*Journal of vacuum science & technology. B, Microelectronics and nanometer structures (Online)

{
    "leader": "01959nas a2200337 a 4500",
    "fields": [
        {
            "001": "itacnp2111037"
        },
        {
            "003": "IT-ACNP"
        },
        {
            "005": "20241204070000.0"
        },
        {
            "007": "cr"
        },
        {
            "008": "020612 19912009usab  p             engcr"
        },
        {
            "022": {
                "ind1": " ",
                "ind2": " ",
                "subfields": [
                    {
                        "a": "1520-8567"
                    }
                ]
            }
        },
        {
            "024": {
                "ind1": "7",
                "ind2": " ",
                "subfields": [
                    {
                        "a": "P 00232447"
                    },
                    {
                        "2": "CNR"
                    }
                ]
            }
        },
        {
            "024": {
                "ind1": "7",
                "ind2": " ",
                "subfields": [
                    {
                        "a": "itacnp2111037"
                    },
                    {
                        "2": "IT-ACNP"
                    }
                ]
            }
        },
        {
            "035": {
                "ind1": " ",
                "ind2": " ",
                "subfields": [
                    {
                        "a": "(ISSN)1520-8567"
                    }
                ]
            }
        },
        {
            "040": {
                "ind1": " ",
                "ind2": " ",
                "subfields": [
                    {
                        "a": "acnp"
                    }
                ]
            }
        },
        {
            "044": {
                "ind1": " ",
                "ind2": " ",
                "subfields": [
                    {
                        "a": "usa"
                    },
                    {
                        "c": "USA"
                    }
                ]
            }
        },
        {
            "082": {
                "ind1": " ",
                "ind2": " ",
                "subfields": [
                    {
                        "a": "621"
                    }
                ]
            }
        },
        {
            "082": {
                "ind1": " ",
                "ind2": " ",
                "subfields": [
                    {
                        "a": "NULL"
                    }
                ]
            }
        },
        {
            "222": {
                "ind1": " ",
                "ind2": "0",
                "subfields": [
                    {
                        "a": "Journal of vacuum science & technology. B, Microelectronics and nanometer structures"
                    },
                    {
                        "b": "Online"
                    }
                ]
            }
        },
        {
            "245": {
                "ind1": "0",
                "ind2": "0",
                "subfields": [
                    {
                        "a": "Journal of vacuum science & technology. B, Microelectronics and nanometer structures"
                    }
                ]
            }
        },
        {
            "260": {
                "ind1": " ",
                "ind2": " ",
                "subfields": [
                    {
                        "a": "Woodbury, N.Y."
                    },
                    {
                        "b": "Published for the American Vacuum Society by the American Institute of Physics"
                    }
                ]
            }
        },
        {
            "264": {
                "ind1": " ",
                "ind2": "2",
                "subfields": [
                    {
                        "c": "Data export is allowed to ACNP participating libraries for institutional purposes and to individuals for personal, non-commercial uses only. Please contact the Bologna University ACNP Team ( acnp.sba.unibo.it\/chi-siamo\/staff-acnp ) to request permission to use exported data outside the scope of the above license, including but not limited to republication to a group or republishing the website or parts of the website."
                    }
                ]
            }
        },
        {
            "264": {
                "ind1": " ",
                "ind2": "4",
                "subfields": [
                    {
                        "b": "Universit\u00c3\u00a0 di Bologna"
                    },
                    {
                        "c": "copyright2026"
                    }
                ]
            }
        },
        {
            "541": {
                "ind1": " ",
                "ind2": " ",
                "subfields": [
                    {
                        "a": "issn"
                    },
                    {
                        "e": "1615657"
                    }
                ]
            }
        },
        {
            "710": {
                "ind1": "0",
                "ind2": " ",
                "subfields": [
                    {
                        "a": " American Vacuum Society.; American Institute of Physics."
                    }
                ]
            }
        },
        {
            "785": {
                "ind1": "1",
                "ind2": "0",
                "subfields": [
                    {
                        "t": "Journal of vacuum science and technology. B, Nanotechnology & microelectronics (Online)"
                    },
                    {
                        "w": "2981804"
                    },
                    {
                        "x": "2166-2754"
                    }
                ]
            }
        },
        {
            "776": {
                "ind1": "1",
                "ind2": " ",
                "subfields": [
                    {
                        "t": "Journal of vacuum science & technology. B, Microelectronics and nanometer structures"
                    },
                    {
                        "w": "923932"
                    },
                    {
                        "x": "1071-1023"
                    }
                ]
            }
        },
        {
            "856": {
                "ind1": "4",
                "ind2": "0",
                "subfields": [
                    {
                        "u": "http:\/\/scitation.aip.org\/content\/avs\/journal\/jvstb\/browse"
                    }
                ]
            }
        },
        {
            "856": {
                "ind1": "4",
                "ind2": "0",
                "subfields": [
                    {
                        "u": "http:\/\/ieeexplore.ieee.org\/xpl\/RecentIssue.jsp?punumber=4915583"
                    }
                ]
            }
        },
        {
            "856": {
                "ind1": "4",
                "ind2": "0",
                "subfields": [
                    {
                        "a": "acnp.unibo.it"
                    },
                    {
                        "n": "ACNP Italian Union Catalogue of Serials"
                    },
                    {
                        "u": "https:\/\/acnpsearch.unibo.it\/journal\/2111037"
                    }
                ]
            }
        },
        {
            "856": {
                "ind1": "4",
                "ind2": "0",
                "subfields": [
                    {
                        "a": "acnp.sba.unibo.it\/"
                    },
                    {
                        "n": "ARPAC Area Patrimonio Culturale - Universit\u00c3\u00a0 di Bologna"
                    },
                    {
                        "m": "acnp.support@unibo.it"
                    },
                    {
                        "u": "https:\/\/acnp.sba.unibo.it"
                    }
                ]
            }
        }
    ]
}