Authors: SONG HJ RACK MJ ABUGHARBIEH K LEE SY KHAN V FERRY DK ALLEE DR

Citation: Hj. Song et al., 25 NM CHROMIUM-OXIDE LINES BY SCANNING TUNNELING LITHOGRAPHY IN AIR, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3720-3724