25 NM CHROMIUM-OXIDE LINES BY SCANNING TUNNELING LITHOGRAPHY IN AIR

Authors
SONG HJ RACK MJ ABUGHARBIEH K LEE SY KHAN V FERRY DK ALLEE DR
Citation
Hj. Song et al., 25 NM CHROMIUM-OXIDE LINES BY SCANNING TUNNELING LITHOGRAPHY IN AIR, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3720-3724
Citations number
24
Categorie Soggetti
Physics, Applied
Journal title
Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena → ACNP
ISSN journal
10711023
Volume
12
Issue
6
Year of publication
1994
Pages
3720 - 3724
Database
ISI
SICI code
1071-1023(1994)12:6<3720:2NCLBS>2.0.ZU;2-S