Citation: Dw. Weyburne et Bs. Ahern, DESIGN AND OPERATING CONSIDERATIONS FOR A WATER-COOLED CLOSE-SPACED REACTANT INJECTOR IN A PRODUCTION SCALE MOCVD REACTOR, Journal of crystal growth, 170(1-4), 1997, pp. 77-82
Authors:
KUNZ RR
CLARK HR
NITISHIN PM
ROTHSCHILD M
AHERN BS
Citation: Rr. Kunz et al., HIGH-RESOLUTION STUDIES OF CRYSTALLINE DAMAGE-INDUCED BY LAPPING AND SINGLE-POINT DIAMOND MACHINING OF SI(100), Journal of materials research, 11(5), 1996, pp. 1228-1237