Authors:
PATSIS G
RAPTIS I
GLEZOS N
ARGITIS P
HATZAKIS M
AIDINIS CJ
GENTILI M
MAGGIORA R
Citation: G. Patsis et al., GEL FORMATION THEORY APPROACH FOR THE MODELING OF NEGATIVE CHEMICALLYAMPLIFIED E-BEAM RESISTS, Microelectronic engineering, 35(1-4), 1997, pp. 157-160
Authors:
EVERETT JP
SCHMIDT DL
ROSE GD
ARGRITIS P
AIDINIS CJ
HATZAKIS M
Citation: Jp. Everett et al., SYNTHESIS OF SOME ONIUM SALTS AND THEIR COMPARISON AS CATIONIC PHOTOINITIATORS IN AN EPOXY RESIST, Polymer, 38(7), 1997, pp. 1719-1723
Authors:
ARGITIS P
RAPTIS I
AIDINIS CJ
GLEZOS N
BACIOCCHI M
EVERETT J
HATZAKIS M
Citation: P. Argitis et al., ADVANCED EPOXY NOVOLAC RESIST FOR FAST HIGH-RESOLUTION ELECTRON-BEAM LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 3030-3034