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Authors: LIU GL UCHIDA H AIKAWA I KURODA S HIRASHITA N

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Authors: OHTOMO A IDA J YONEKAWA K KAI K AIKAWA I KITA A NISHI K

Citation: A. Ohtomo et al., DOPANT REDISTRIBUTION EFFECT ON POST-JUNCTION SILICIDE SCHEME SHALLOWJUNCTION AND A PROPOSAL OF NOVEL SELF-ALIGNED SILICIDE SCHEME, JPN J A P 1, 33(1B), 1994, pp. 475-479