Authors: ROCHER V POYARD S JAFFREZICRENAULT N AJOUX C LEMITI M

Citation: V. Rocher et al., PHOTO-CVD SILICON-NITRIDE THIN-LAYERS AS PH-ISFET SENSITIVE MEMBRANE (VOL 18, PG 342, 1994), Sensors and actuators. B, Chemical, 28(1), 1995, pp. 82-82

Authors: ROCHER V POYARD S JAFFREZICRENAULT N AJOUX C LEMITI M SIBAI A

Citation: V. Rocher et al., PHOTO-CVD SILICON-NITRIDE THIN-LAYERS AS PH-ISFET SENSITIVE MEMBRANE, Sensors and actuators. B, Chemical, 19(1-3), 1994, pp. 342-347