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NI-SILICIDE FORMATION - DEPENDENCE ON CRYSTALLOGRAPHIC ORIENTATION OFSI SUBSTRATES
Authors:
YAMAUCHI S HIRAI M KUSAKA M IWAMI M NAKAMURA H YOKOTA Y AKIYAMA A WATABE H
Citation:
S. Yamauchi et al., NI-SILICIDE FORMATION - DEPENDENCE ON CRYSTALLOGRAPHIC ORIENTATION OFSI SUBSTRATES, JPN J A P 1, 32(7), 1993, pp. 3237-3246
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26-26
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