Authors: PALLEAU J JOURDAIN D OBERLIN JC ALAIMO M ARGOUD G AUBERT D BEUDON M BOUZID MJ LAVIALE D TEMPLIER F TORRES J

Citation: J. Palleau et al., HIGH-DENSITY MULTILAYER INTERCONNECT MODULE FABRICATION BY LIFT-OFF TECHNIQUE, Journal de physique. III, 3(4), 1993, pp. 793-804