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Results: 1-5 |
Results: 5

Authors: DECOSTER W BRIJS B DELEU J ALAY J VANDERVORST W
Citation: W. Decoster et al., IN-SITU OBSERVATION BY RBS OF OXYGEN GETTERING DURING CS SPUTTERING OF SI-BASED MATERIALS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 118(1-4), 1996, pp. 82-87

Authors: BRIJS B DECOSTER W BENDER H ALAY J OSICEANU P VANDERVORST W
Citation: B. Brijs et al., SPUTTERING PHENOMENA OF COSI2 UNDER LOW-ENERGY OXYGEN BOMBARDMENT, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 85(1-4), 1994, pp. 306-310

Authors: DECOSTER W BRIJS B OSICEANU P ALAY J CAYMAX M VANDERVORST W
Citation: W. Decoster et al., ION-BEAM MIXING AND OXIDATION OF A SI GE-MULTILAYER UNDER OXYGEN BOMBARDMENT/, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 85(1-4), 1994, pp. 911-915

Authors: DECOSTER W BRIJS B BENDER H ALAY J VANDERVORST W
Citation: W. Decoster et al., RBS, AES AND XPS ANALYSIS OF ION-BEAM-INDUCED NITRIDATION OF SI AND SIGE ALLOYS, Vacuum, 45(4), 1994, pp. 389-395

Authors: ELST K VANDERVORST W ALAY J SNAUWAERT J HELLEMANS L
Citation: K. Elst et al., INFLUENCE OF OXYGEN ON THE FORMATION OF RIPPLES ON SI, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 1968-1981
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