Authors:
LEROY O
GOUSSET G
ALVES LL
PERRIN J
JOLLY J
Citation: O. Leroy et al., 2-DIMENSIONAL MODELING OF SIH4-H-2 RADIOFREQUENCY DISCHARGES FOR A-SI-H DEPOSITION, Plasma sources science & technology, 7(3), 1998, pp. 348-358
Citation: Ll. Alves et al., SELF-CONTAINED SOLUTION TO THE SPATIALLY INHOMOGENEOUS ELECTRON BOLTZMANN-EQUATION IN A CYLINDRICAL PLASMA POSITIVE-COLUMN, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics, 55(1), 1997, pp. 890-906