Authors:
ANSEL Y
ROMANOWICZ B
RENAUD P
SCHROPFER G
Citation: Y. Ansel et al., GLOBAL-MODEL GENERATION FOR A CAPACITIVE SILICON ACCELEROMETER BY FINITE-ELEMENT ANALYSIS, Sensors and actuators. A, Physical, 67(1-3), 1998, pp. 153-158
Authors:
SCHROPFER G
BALLANDRAS S
DELABACHELERIE M
BLIND P
ANSEL Y
Citation: G. Schropfer et al., FABRICATION OF A NEW HIGHLY-SYMMETRICAL, INPLANE ACCELEROMETER STRUCTURE BY ANISOTROPIC ETCHING OF (100)SILICON, Journal of micromechanics and microengineering, 7(2), 1997, pp. 71-78