Authors: KAMIKUBO T ABE T OOGI S ANZE H SHIMIZU M ITOH M NAKASUGI T TAKIGAWA T IIJIMA T HATTORI Y TOJO T

Citation: T. Kamikubo et al., PROXIMITY EFFECT CORRECTION FOR ELECTRON-BEAM LITHOGRAPHY - HIGHLY ACCURATE CORRECTION METHOD, JPN J A P 1, 36(12B), 1997, pp. 7546-7551