Authors: KALIN BA VOLKOV NV ATALIKOVA IK RYBALKO VF TOLSTOLUTSKAYA GD

Citation: Ba. Kalin et al., SPUTTERING AND MIXING IN SYSTEMS FILM-SUBSTRATE UNDER IMPACT OF THE POLY-ENERGY AR-BEAM WITH THE MEAN ENERGY OF 10 KEV( ION), Izvestia Akademii nauk SSSR. Seria fiziceskaa, 62(7), 1998, pp. 1477-1482