Authors:
KALIN BA
VOLKOV NV
ATALIKOVA IK
RYBALKO VF
TOLSTOLUTSKAYA GD
Citation: Ba. Kalin et al., SPUTTERING AND MIXING IN SYSTEMS FILM-SUBSTRATE UNDER IMPACT OF THE POLY-ENERGY AR-BEAM WITH THE MEAN ENERGY OF 10 KEV( ION), Izvestia Akademii nauk SSSR. Seria fiziceskaa, 62(7), 1998, pp. 1477-1482