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Citation: P. Attia et al., FABRICATION AND CHARACTERIZATION OF ELECTROSTATICALLY DRIVEN SILICON MICROBEAMS, Microelectronics, 29(9), 1998, pp. 641-644

Authors: ATTIA P HESTO P

Citation: P. Attia et P. Hesto, DEPENDENCE OF THE RESONANT-FREQUENCY OF MICROMACHINED GOLD MICROBEAMSON POLARIZATION VOLTAGE, Microelectronics, 29(8), 1998, pp. 543-546