Authors: MACDONALD NC ADAMS SG AYON AA BOHRINGER KF CHEN LY DAS JH HARONIAN D HOFMANN W HUANG XT JAZAIRY A MIHAILOVICH RE MILLER SA OGO I PRASAD R REED BW SAIF MTA SHAW KA WEBB RY XU Y

Citation: Nc. Macdonald et al., MICROMACHINED MICRODEVICES AND MICROINSTRUMENTS, Microelectronic engineering, 30(1-4), 1996, pp. 563-564