MICROMACHINED MICRODEVICES AND MICROINSTRUMENTS

Authors
MACDONALD NC ADAMS SG AYON AA BOHRINGER KF CHEN LY DAS JH HARONIAN D HOFMANN W HUANG XT JAZAIRY A MIHAILOVICH RE MILLER SA OGO I PRASAD R REED BW SAIF MTA SHAW KA WEBB RY XU Y
Citation
Nc. Macdonald et al., MICROMACHINED MICRODEVICES AND MICROINSTRUMENTS, Microelectronic engineering, 30(1-4), 1996, pp. 563-564
Citations number
NO
Categorie Soggetti
Optics,"Physics, Applied","Engineering, Eletrical & Electronic
Journal title
Microelectronic engineering → ACNP
ISSN journal
01679317
Volume
30
Issue
1-4
Year of publication
1996
Pages
563 - 564
Database
ISI
SICI code
0167-9317(1996)30:1-4<563:MMAM>2.0.ZU;2-Z