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Results: 1
Low-defect target metallurgy development for sub-0.18 mu m Al-based interconnects
Authors:
Abburi, M Pavate, V Narasimhan, M Ramaswami, S Kardokus, J Buehler, J Yap, L
Citation:
M. Abburi et al., Low-defect target metallurgy development for sub-0.18 mu m Al-based interconnects, SOL ST TECH, 42(12), 1999, pp. 55
Risultati:
1-1
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