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Citation: W. Barth et al., Evaluation and fabrication of AFM array for ESA-Midas /Rosetta space mission, MICROEL ENG, 57-8, 2001, pp. 825-831

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Citation: Lm. Zambov et al., Gas-sensitive properties of nitrogen-rich carbon nitride films, ADVAN MATER, 12(9), 2000, pp. 656