Authors: Abramowitz, P Kiene, M Ho, PS

Citation: P. Abramowitz et al., How low-energy ions can enhance depositions on low-K dielectrics, J VAC SCI A, 18(5), 2000, pp. 2254-2261

Authors: Abramowitz, P Kiene, M Ho, PS

Citation: P. Abramowitz et al., Effects of a low-energy ion beam on the growth of titanium nitride layers near the interface of a polyimide, APPL PHYS L, 74(22), 1999, pp. 3293-3295