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ITA
ENG
Results:
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Results: 2
How low-energy ions can enhance depositions on low-K dielectrics
Authors:
Abramowitz, P Kiene, M Ho, PS
Citation:
P. Abramowitz et al., How low-energy ions can enhance depositions on low-K dielectrics, J VAC SCI A, 18(5), 2000, pp. 2254-2261
Effects of a low-energy ion beam on the growth of titanium nitride layers near the interface of a polyimide
Authors:
Abramowitz, P Kiene, M Ho, PS
Citation:
P. Abramowitz et al., Effects of a low-energy ion beam on the growth of titanium nitride layers near the interface of a polyimide, APPL PHYS L, 74(22), 1999, pp. 3293-3295
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