Authors:
Tada, H
Abramson, AR
Mann, SE
Miaoulis, IN
Wong, PY
Citation: H. Tada et al., Evaluating the effects of thin film patterns on the temperature distribution of silicon wafers during radiant processing, OPT ENG, 39(8), 2000, pp. 2296-2304
Authors:
Abramson, AR
Nieva, P
Tada, H
Zavracky, P
Miaoulis, IN
Wong, PY
Citation: Ar. Abramson et al., Effect of doping level during rapid thermal processing of multilayer structures, J MATER RES, 14(6), 1999, pp. 2402-2410