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Citation: J. Meijer et al., Microprobe as implanter for semiconductor devices, NUCL INST B, 158(1-4), 1999, pp. 39-43

Authors: Adamczewski, J Stephan, A Meijer, J Becker, HW Bukow, HH Rolfs, C

Citation: J. Adamczewski et al., A liquid metal ion source in a high energy microprobe setup, NUCL INST B, 158(1-4), 1999, pp. 119-123