Authors: Samavedam, SB Dip, A Phillips, AM Tobin, PJ Mihopolous, T Taylor, WJ Adetutu, O

Citation: Sb. Samavedam et al., Elevated source drain devices using silicon selective epitaxial growth, J VAC SCI B, 18(3), 2000, pp. 1244-1250

Authors: Gilmer, D Hobbs, C Hegde, R La, L Adetutu, O Conner, J Tiner, M Prabhu, L Bagchi, S Tobin, P

Citation: D. Gilmer et al., Investigation of titanium nitride gates for tantalum pentoxide and titanium dioxide dielectrics, J VAC SCI A, 18(4), 2000, pp. 1158-1162