Authors: Henson, WK Ahmed, KZ Vogel, EM Hauser, JR Wortman, JJ Venables, RD Xu, M Venables, D

Citation: Wk. Henson et al., Estimating oxide thickness of tunnel oxides down to 1.4 nm using conventional capacitance-voltage measurements on MOS capacitors, IEEE ELEC D, 20(4), 1999, pp. 179-181