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In situ quartz crystal microbalance and quadrupole mass spectrometry studies of atomic layer deposition of aluminum oxide from trimethylaluminum and water
Authors: Rahtu, A Alaranta, T Ritala, M
Citation: A. Rahtu et al., In situ quartz crystal microbalance and quadrupole mass spectrometry studies of atomic layer deposition of aluminum oxide from trimethylaluminum and water, LANGMUIR, 17(21), 2001, pp. 6506-6509
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