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Results: 2
Effect of composition on thermal stability and electrical resistivity of Ta-Si-N films
Authors: Olowolafe, JO Rau, I Unruh, KM Swann, CP Jawad, ZS Alford, T
Citation: Jo. Olowolafe et al., Effect of composition on thermal stability and electrical resistivity of Ta-Si-N films, THIN SOL FI, 365(1), 2000, pp. 19-21
The effect of Ta to Si ratio on magnetron sputtered Ta-Si-N thin films
Authors: Olowolafe, JO Rau, I Unruh, KM Swann, CP Jawad, Z Alford, T
Citation: Jo. Olowolafe et al., The effect of Ta to Si ratio on magnetron sputtered Ta-Si-N thin films, J ELEC MAT, 28(12), 1999, pp. 1399-1402
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