Login
|
New Account
AAAAAA
ITA
ENG
Results:
1-1
|
Results: 1
Infrared absorption analysis of organosilicon/oxygen plasmas in a microwave multipolar plasma excited by distributed electron cyclotron resonance
Authors:
Raynaud, P Amilis, T Segui, Y
Citation:
P. Raynaud et al., Infrared absorption analysis of organosilicon/oxygen plasmas in a microwave multipolar plasma excited by distributed electron cyclotron resonance, APPL SURF S, 139, 1999, pp. 285-291
Risultati:
1-1
|