Authors:
Artamanov, VV
Valakh, MY
Klyui, NI
Mel'nik, VP
Romanyuk, AB
Romanyuk, BN
Yukhimchuk, VA
Citation: Vv. Artamanov et al., Influence of oxygen on the ion-beam synthesis of silicon carbide buried layers in silicon, SEMICONDUCT, 32(12), 1998, pp. 1261-1265