Authors: Artamanov, VV Valakh, MY Klyui, NI Mel'nik, VP Romanyuk, AB Romanyuk, BN Yukhimchuk, VA

Citation: Vv. Artamanov et al., Influence of oxygen on the ion-beam synthesis of silicon carbide buried layers in silicon, SEMICONDUCT, 32(12), 1998, pp. 1261-1265