Authors:
Sueoka, K
Akatsuka, M
Yonemura, M
Ono, T
Asayama, E
Katahama, H
Citation: K. Sueoka et al., Effect of heavy boron doping on oxygen precipitation in Czochralski silicon substrates of epitaxial wafers, J ELCHEM SO, 147(2), 2000, pp. 756-762
Authors:
Ono, T
Romanowski, A
Asayama, E
Horie, H
Sueoka, K
Tsuya, H
Rozgonyi, GA
Citation: T. Ono et al., Oxide precipitate-induced dislocation generation in heavily boron-doped Czochralski silicon, J ELCHEM SO, 146(9), 1999, pp. 3461-3465
Authors:
Ono, T
Rozgonyi, GA
Asayama, E
Horie, H
Tsuya, H
Sueoka, K
Citation: T. Ono et al., Oxygen diffusion in heavily antimony-, arsenic-, and boron-doped Czochralski silicon wafers, APPL PHYS L, 74(24), 1999, pp. 3648-3650