Authors: Huang, JS Gates, AS Kang, SH Shofner, TL Ashton, RA Obeng, YS

Citation: Js. Huang et al., Comparative study on the effect of misalignment on bordered and borderlesscontacts, J ELEC MAT, 30(4), 2001, pp. 360-366

Authors: Bourdelle, KK Chen, YN Ashton, RA Rubin, LM Agarwal, A Morris, WH

Citation: Kk. Bourdelle et al., Evaluation of high dose, high energy boron implantation into Cz substratesfor epi-replacement in CMOS technology, IEEE DEVICE, 48(9), 2001, pp. 2043-2049