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Results:
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Results: 1
Factors which determine the orientation of CVD Al films grown on TiN
Authors:
Avinun, M Kaplan, WD Eizenberg, M Guo, T Mosely, R
Citation:
M. Avinun et al., Factors which determine the orientation of CVD Al films grown on TiN, SOL ST ELEC, 43(6), 1999, pp. 1011-1014
Risultati:
1-1
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