Authors: LATULIPE D MALDONADO JR MITCHELL P LEDUC R BABICH I

Citation: D. Latulipe et al., FABRICATION OF X-RAY-LITHOGRAPHY MASKS WITH OPTICAL LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 4345-4349

Authors: MALDONADO JR BABICH I DIMILIA V

Citation: Jr. Maldonado et al., MEASUREMENT OF THE EFFECTIVE WAVELENGTH OF X-RAY-LITHOGRAPHY SOURCES, Microelectronic engineering, 21(1-4), 1993, pp. 113-116