Authors: BAE GN KINNEY PD LIU BYH PUI DYH

Citation: Gn. Bae et al., INVESTIGATION OF AEROSOL SPATIAL DISTRIBUTIONS DOWNSTREAM OF A CRITICAL ORIFICE AT LOW-PRESSURE, Aerosol science and technology, 28(6), 1998, pp. 479-488

Authors: KINNEY PD BAE GN PUI DYH LIU BYH

Citation: Pd. Kinney et al., PARTICLE BEHAVIOR IN VACUUM-SYSTEMS - IMPLICATIONS FOR IN-SITU PARTICLE MONITORING IN SEMICONDUCTOR PROCESSING EQUIPMENT, Journal of the IES, 39(6), 1996, pp. 40-45

Authors: BAE GN LEE CS PARK SO

Citation: Gn. Bae et al., MEASUREMENTS AND CONTROL OF PARTICLE DEPOSITION VELOCITY ON A HORIZONTAL WAFER WITH THERMOPHORETIC EFFECT, Aerosol science and technology, 23(3), 1995, pp. 321-330

Authors: BAE GN LEE CS PARK SO

Citation: Gn. Bae et al., MEASUREMENT OF PARTICLE DEPOSITION VELOCITY TOWARD A HORIZONTAL SEMICONDUCTOR WAFER BY USING A WAFER SURFACE SCANNER, Aerosol science and technology, 21(1), 1994, pp. 72-82

Authors: LIU BYH CHAE SK BAE GN

Citation: Byh. Liu et al., SIZING ACCURACY, COUNTING EFFICIENCY, LOWER DETECTION LIMIT AND REPEATABILITY OF A WAFER SURFACE SCANNER FOR IDEAL AND REAL-WORLD PARTICLES, Journal of the Electrochemical Society, 140(5), 1993, pp. 1403-1409