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ON THE ROLE OF ATOMIC OXYGEN IN THE ETCHING OF ORGANIC POLYMERS IN A RADIOFREQUENCY OXYGEN DISCHARGE
Authors: COLLART EJH BAGGERMAN JAG VISSER RJ
Citation: Ejh. Collart et al., ON THE ROLE OF ATOMIC OXYGEN IN THE ETCHING OF ORGANIC POLYMERS IN A RADIOFREQUENCY OXYGEN DISCHARGE, Journal of applied physics, 78(1), 1995, pp. 47-54
POWER DISSIPATION MEASUREMENTS IN A LOW-PRESSURE N(2) RADIOFREQUENCY DISCHARGE
Authors: BAGGERMAN JAG VISSER RJ COLLART EJH
Citation: Jag. Baggerman et al., POWER DISSIPATION MEASUREMENTS IN A LOW-PRESSURE N(2) RADIOFREQUENCY DISCHARGE, Journal of applied physics, 76(2), 1994, pp. 738-746
ION-INDUCED ETCHING OF ORGANIC POLYMERS IN ARGON AND OXYGEN RADIOFREQUENCY PLASMAS
Authors: BAGGERMAN JAG VISSER RJ COLLART EJH
Citation: Jag. Baggerman et al., ION-INDUCED ETCHING OF ORGANIC POLYMERS IN ARGON AND OXYGEN RADIOFREQUENCY PLASMAS, Journal of applied physics, 75(2), 1994, pp. 758-769
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