Citation: Ejh. Collart et al., ON THE ROLE OF ATOMIC OXYGEN IN THE ETCHING OF ORGANIC POLYMERS IN A RADIOFREQUENCY OXYGEN DISCHARGE, Journal of applied physics, 78(1), 1995, pp. 47-54
Citation: Jag. Baggerman et al., POWER DISSIPATION MEASUREMENTS IN A LOW-PRESSURE N(2) RADIOFREQUENCY DISCHARGE, Journal of applied physics, 76(2), 1994, pp. 738-746
Citation: Jag. Baggerman et al., ION-INDUCED ETCHING OF ORGANIC POLYMERS IN ARGON AND OXYGEN RADIOFREQUENCY PLASMAS, Journal of applied physics, 75(2), 1994, pp. 758-769