Authors: BAUCH L JAGDHOLD U BOTTCHER M

Citation: L. Bauch et al., ELECTRON-BEAM LITHOGRAPHY OVER TOPOGRAPHY, Microelectronic engineering, 30(1-4), 1996, pp. 53-56

Authors: BAUCH L BOTTCHER M JAGDHOLD U

Citation: L. Bauch et al., RESIST PROCESS TO JOIN ELECTRON-BEAM LITHOGRAPHY AND PHOTOLITHOGRAPHY, Microelectronic engineering, 27(1-4), 1995, pp. 371-374

Authors: BOTTCHER M BAUCH L STOLBERG I

Citation: M. Bottcher et al., SURFACE IMAGING BY SILYLATION FOR LOW-VOLTAGE ELECTRON-BEAM LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3473-3477

Authors: BAUCH L WOLFF A JAGDHOLD U BAUER J

Citation: L. Bauch et al., DRY-ETCHING PATTERN TRANSFER OF 0.3 MU-M STRUCTURES IN TECHNOLOGICAL LAYERS USING TRANSMISSION PHASE MASKS, Microelectronic engineering, 23(1-4), 1994, pp. 377-380

Authors: HAREVEN D GUTFINGER T PNUELI L BAUCH L COHEN O LIFSCHITZ E

Citation: D. Hareven et al., THE FLORAL SYSTEM OF TOMATO, Euphytica, 79(3), 1994, pp. 235-243