Authors: PALMER BJ BECALSKA A HO TWH HILL RH

Citation: Bj. Palmer et al., PHOTOLITHOGRAPHY OF AMORPHOUS FILMS OF (ETA(5)-C5H5)2TI(N3)2 ON SILICON(111) RESULTING IN TIO2 - THE MECHANISM OF THE PHOTODEPOSITION REACTION, Journal of Materials Science, 28(22), 1993, pp. 6013-6020