Citation: G. Beique et al., STRUCTURAL CHARACTERIZATION OF POLYSILICO N THIN-FILMS FABRICATED BY LOW-PRESSURE CHEMICAL-DEPOSITION OF SILANE AND DOPED IN-SITU WITH PHOSPHORUS, Canadian journal of physics, 73(7-8), 1995, pp. 526-529
Authors:
GAGNON G
CURRIE JF
BEIQUE G
BREBNER JL
GUJRATHI SC
OUELLET L
Citation: G. Gagnon et al., CHARACTERIZATION OF REACTIVELY EVAPORATED TIN LAYERS FOR DIFFUSION BARRIER APPLICATIONS, Journal of applied physics, 75(3), 1994, pp. 1565-1570