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ION SOURCES FOR MICROSIZE ION-BEAM TREATMENT OF OPTICAL PARTS
Authors:
MICHNEV RA SHTANDEL SK BELOKUROV AP MARTYNOV MI
Citation:
Ra. Michnev et al., ION SOURCES FOR MICROSIZE ION-BEAM TREATMENT OF OPTICAL PARTS, Review of scientific instruments, 69(2), 1998, pp. 899-901
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