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Authors: BENDEDDOUCHE A BERJOAN R BECHE E MERLEMEJEAN T SCHAMM S SERIN V TAILLADES G PRADEL A HILLEL R
Citation: A. Bendeddouche et al., STRUCTURAL CHARACTERIZATION OF AMORPHOUS SICXNY CHEMICAL-VAPOR-DEPOSITED COATINGS, Journal of applied physics, 81(9), 1997, pp. 6147-6154

Authors: BENDEDDOUCHE A BERJOAN R BECHE E SCHAMM S SERIN V CARLES R HILLEL R
Citation: A. Bendeddouche et al., SICN AMORPHOUS MATERIALS CHEMICAL-VAPOR-DEPOSITED USING THE SI(CH3)(4)-NH3-H-2 SYSTEM, Journal de physique. IV, 5(C5), 1995, pp. 793-800

Authors: LLAURO G BENDEDDOUCHE A NADAL M HILLEL R
Citation: G. Llauro et al., TIN-TIXSIY CODEPOSITS APCVD PRODUCED USING THE TICL4-N-2-SIH2CL2-H-2 SYSTEM, Journal de physique. IV, 5(C5), 1995, pp. 801-807
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