Authors:
BENDEDDOUCHE A
BERJOAN R
BECHE E
MERLEMEJEAN T
SCHAMM S
SERIN V
TAILLADES G
PRADEL A
HILLEL R
Citation: A. Bendeddouche et al., STRUCTURAL CHARACTERIZATION OF AMORPHOUS SICXNY CHEMICAL-VAPOR-DEPOSITED COATINGS, Journal of applied physics, 81(9), 1997, pp. 6147-6154
Authors:
BENDEDDOUCHE A
BERJOAN R
BECHE E
SCHAMM S
SERIN V
CARLES R
HILLEL R
Citation: A. Bendeddouche et al., SICN AMORPHOUS MATERIALS CHEMICAL-VAPOR-DEPOSITED USING THE SI(CH3)(4)-NH3-H-2 SYSTEM, Journal de physique. IV, 5(C5), 1995, pp. 793-800
Citation: G. Llauro et al., TIN-TIXSIY CODEPOSITS APCVD PRODUCED USING THE TICL4-N-2-SIH2CL2-H-2 SYSTEM, Journal de physique. IV, 5(C5), 1995, pp. 801-807