Citation: Ha. Bender et al., VELOCITY CHARACTERIZATION OF PARTICULATE DEBRIS FROM LASER-PRODUCED PLASMAS USED FOR EXTREME-ULTRAVIOLET LITHOGRAPHY, Applied optics, 34(28), 1995, pp. 6513-6521
Authors:
RICHARDSON M
SILFVAST WT
BENDER HA
HANZO A
YANOVSKY VP
JIN F
THORPE J
Citation: M. Richardson et al., CHARACTERIZATION AND CONTROL OF LASER-PLASMA FLUX PARAMETERS FOR SOFT-X-RAY PROJECTION LITHOGRAPHY, Applied optics, 32(34), 1993, pp. 6901-6910
Citation: Ha. Bender et al., INVESTIGATION OF DISTORTION AND DAMAGE OF MOLYBDENUM SILICON MULTILAYER REFLECTIVE COATINGS WITH HIGH-INTENSITY ULTRAVIOLET-RADIATION, Applied optics, 32(34), 1993, pp. 6999-7006