AAAAAA
Results:
1-7
|
Results: 7
Authors:
BERENSCHOT JW
OOSTERBROEK RE
LAMMERINK TSJ
ELWENSPOEK MC
Citation: Jw. Berenschot et al., MICROMACHINING OF (111) PLATES IN [001] ORIENTED SILICON, Journal of micromechanics and microengineering, 8(2), 1998, pp. 104-107
Authors:
GUI C
DEBOER M
GARDENIERS JGE
JANSEN H
BERENSCHOT JW
ELWENSPOEK M
Citation: C. Gui et al., FABRICATION OF MULTILAYER SUBSTRATES FOR HIGH-ASPECT-RATIO SINGLE-CRYSTALLINE MICROSTRUCTURES, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 61-66
Authors:
VELDHUIS GJ
GUI C
NAUTA T
KOSTER TM
BERENSCHOT JW
LAMBECK PV
GARDENIERS JGE
ELWENSPOEK M
Citation: Gj. Veldhuis et al., MECHANO-OPTICAL WAVE-GUIDE ON-OFF INTENSITY MODULATOR, Optics letters, 23(19), 1998, pp. 1532-1534
Authors:
BURGER GJ
SMULDERS EJT
BERENSCHOT JW
LAMMERINK TSJ
FLUITMAN JHJ
IMAI S
Citation: Gj. Burger et al., HIGH-RESOLUTION SHADOW-MASK PATTERNING IN DEEP HOLES AND ITS APPLICATION TO AN ELECTRICAL WAFER FEED-THROUGH, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 669-673
Authors:
SPIERING VL
BERENSCHOT JW
ELWENSPOEK M
FLUITMAN JHJ
Citation: Vl. Spiering et al., SACRIFICIAL WAFER BONDING FOR PLANARIZATION AFTER VERY DEEP-ETCHING, Journal of microelectromechanical systems, 4(3), 1995, pp. 151-157
Authors:
SPIERING VL
BERENSCHOT JW
ELWENSPOEK M
Citation: Vl. Spiering et al., PLANARIZATION AND FABRICATION OF BRIDGES ACROSS DEEP GROOVES OR HOLESIN SILICON USING A DRY FILM PHOTORESIST FOLLOWED BY AN ETCH BACK, Journal of micromechanics and microengineering, 5(2), 1995, pp. 189-192
Authors:
BERENSCHOT JW
GARDENIERS JGE
LAMMERINK TSJ
ELWENSPOEK M
Citation: Jw. Berenschot et al., NEW APPLICATIONS OF RF-SPUTTERED GLASS-FILMS AS PROTECTION AND BONDING LAYERS IN SILICON MICROMACHINING, Sensors and actuators. A, Physical, 41(1-3), 1994, pp. 338-343
Risultati:
1-7
|