Citation: A. Malaurie et A. Bessaudou, NUMERICAL-SIMULATION OF THE CHARACTERISTICS OF THE DIFFERENT METALLICSPECIES FALLING ON THE GROWING FILM IN DC MAGNETRON SPUTTERING, Thin solid films, 286(1-2), 1996, pp. 305-316
Authors:
CHALEIX D
CHOQUET P
BESSAUDOU A
FRUGIER L
MACHET J
Citation: D. Chaleix et al., A SPATIAL-DISTRIBUTION STUDY OF A BEAM VAPOR EMITTED BY ELECTRON-BEAM-HEATED EVAPORATION SOURCES, Journal of physics. D, Applied physics, 29(1), 1996, pp. 218-224