Citation: A. Birolini et al., SPECIAL ISSUE ON ELECTRON AND OPTICAL BEAM TESTING OF ELECTRONIC DEVICES - PROCEEDINGS OF THE 3RD EUROPEAN CONFERENCE ON ELECTRON AND OPTICAL BEAM TESTING OF ELECTRONIC DEVICES, SEPTEMBER 1-3, 1993, ZURICH, SWITZERLAND - PREFACE, Microelectronic engineering, 24(1-4), 1994, pp. 180000007-180000007