Authors:
LIDDLE JA
BLAKEY MI
KNUREK CS
MKRTCHYAN MM
NOVEMBRE AE
OCOLA L
SAUNDERS T
WASKIEWICZ WK
Citation: Ja. Liddle et al., SPACE-CHARGE LIMITATIONS TO THROUGHPUT IN PROJECTION ELECTRON-BEAM LITHOGRAPHY (SCALPEL), Microelectronic engineering, 42, 1998, pp. 155-158
Authors:
LIDDLE JA
BLAKEY MI
SAUNDERS T
FARROW RC
FETTER LA
KNUREK CS
KASICA R
NOVEMBRE AE
PEABODY ML
TENNANT DM
WINDT DL
POSTEK M
Citation: Ja. Liddle et al., METROLOGY OF SCATTERING WITH ANGULAR LIMITATION PROJECTION ELECTRON LITHOGRAPHY MASKS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2197-2203
Authors:
HARRIOTT LR
BERGER SD
BIDDICK C
BLAKEY MI
BOWLER SW
BRADY K
CAMARDA RM
CONNELLY WF
CRORKEN A
CUSTY J
DEMARCO R
FARROW RC
FELKER JA
FETTER L
FREEMAN R
HOPKINS L
HUGGINS HA
KNUREK CS
KRAUS JS
LIDDLE JA
MKRTYCHAN M
NOVEMBRE AE
PEABODY ML
TARASCON RG
WADE HH
WASKIEWICZ WK
WATSON GP
WERDER KS
WINDT D
Citation: Lr. Harriott et al., THE SCALPEL PROOF-OF-CONCEPT SYSTEM, Microelectronic engineering, 35(1-4), 1997, pp. 477-480
Authors:
HARRIOTT LR
BERGER SD
BIDDICK C
BLAKEY MI
BOWLER SW
BRADY K
CAMARDA RM
CONNELLY WF
CRORKEN A
CUSTY J
DIMARCO R
FARROW RC
FELKER JA
FETTER L
FREEMAN R
HOPKINS L
HUGGINS HA
KNUREK CS
KRAUS JS
LIDDLE JA
MKRTYCHAN M
NOVEMBRE AE
PEABODY ML
TARASCON RG
WADE HH
WASKIEWICZ WK
WATSON GP
WERDER KS
WINDT D
Citation: Lr. Harriott et al., PRELIMINARY-RESULTS FROM A PROTOTYPE PROJECTION ELECTRON-BEAM STEPPER-SCATTERING WITH ANGULAR LIMITATION PROJECTION ELECTRON-BEAM LITHOGRAPHY PROOF-OF-CONCEPT SYSTEM, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3825-3828
Authors:
LIDDLE JA
BERGER SD
BIDDICK CJ
BLAKEY MI
BOLAN KJ
BOWLER SW
BRADY K
CAMARDA RM
CONNELLY WF
CRORKEN A
CUSTY J
FARROW RC
FELKER JA
FETTER LA
FREEMAN B
HARRIOTT LR
HOPKINS L
HUGGINS HA
KNUREK CS
KRAUS JS
MIXON DA
MKRTCHYAN MM
NOVEMBRE AE
PEABODY ML
SIMPSON WM
TARASCON RG
WADE HH
WASKIEWICZ WK
WATSON GP
WILLIAMS JK
WINDT DL
Citation: Ja. Liddle et al., THE SCATTERING WITH ANGULAR LIMITATION IN PROJECTION ELECTRON-BEAM LITHOGRAPHY (SCALPEL) SYSTEM, JPN J A P 1, 34(12B), 1995, pp. 6663-6671
Authors:
WATSON GP
BERGER SD
LIDDLE JA
FETTER LA
FARROW RC
TARASCON RG
MKRTCHYAN M
NOVEMBRE AE
BLAKEY MI
BOLAN KJ
POLI L
Citation: Gp. Watson et al., PRECISE MEASUREMENT OF THE EFFECTIVE BACKSCATTER COEFFICIENT FOR 100-KEV ELECTRON-BEAM LITHOGRAPHY ON SI, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2535-2538