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Authors: WATSON GP BERGER SD LIDDLE JA FETTER LA FARROW RC TARASCON RG MKRTCHYAN M NOVEMBRE AE BLAKEY MI BOLAN KJ POLI L

Citation: Gp. Watson et al., PRECISE MEASUREMENT OF THE EFFECTIVE BACKSCATTER COEFFICIENT FOR 100-KEV ELECTRON-BEAM LITHOGRAPHY ON SI, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2535-2538