Authors:
BOGOLYUBOV EP
BOCHKOV VD
VERETENNIKOV VA
VEKHOREVA LT
GRIBKOV VA
DUBROVSKII AV
IVANOV YP
ISAKOV AI
KROKHIN ON
LEE P
LEE S
NIKULIN VY
SERBAN A
SILIN PV
FENG X
ZHANG GX
Citation: Ep. Bogolyubov et al., A POWERFUL SOFT-X-RAY SOURCE FOR X-RAY-LITHOGRAPHY BASED ON PLASMA FOCUSING, Physica scripta. T, 57(4), 1998, pp. 488-494