Citation: Kf. Bohringer et al., COMPUTATIONAL METHODS FOR DESIGN AND CONTROL OF MEMS MICROMANIPULATORARRAYS, IEEE computational science & engineering, 4(1), 1997, pp. 17-29
Authors:
MACDONALD NC
ADAMS SG
AYON AA
BOHRINGER KF
CHEN LY
DAS JH
HARONIAN D
HOFMANN W
HUANG XT
JAZAIRY A
MIHAILOVICH RE
MILLER SA
OGO I
PRASAD R
REED BW
SAIF MTA
SHAW KA
WEBB RY
XU Y
Citation: Nc. Macdonald et al., MICROMACHINED MICRODEVICES AND MICROINSTRUMENTS, Microelectronic engineering, 30(1-4), 1996, pp. 563-564