Authors: BOSKIN ED DALTON TJ

Citation: Ed. Boskin et Tj. Dalton, PRODUCTION EVALUATION OF REAL-TIME STATISTICAL PROCESS-CONTROL ON A SUB-O.5 MU-M INDUCTIVELY-COUPLED METAL ETCH PROCESS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(3), 1997, pp. 1371-1376

Authors: LEE SF BOSKIN ED LIU HC WEN EH SPANOS CJ

Citation: Sf. Lee et al., RTSPC - A SOFTWARE UTILITY FOR REAL-TIME SPC AND TOOL DATA-ANALYSIS, IEEE transactions on semiconductor manufacturing, 8(1), 1995, pp. 17-25

Authors: BOSKIN ED SPANOS CJ KORSH GJ

Citation: Ed. Boskin et al., A METHOD FOR MODELING THE MANUFACTURABILITY OF IC DESIGNS, IEEE transactions on semiconductor manufacturing, 7(3), 1994, pp. 298-305